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Profile
| Academic position | Currently without academic position |
|---|---|
| Research fields | Atomic Physics, Molecular Physics, Laser Physics,Plasma Physics,Surface Physics |
| Keywords | EUV Light Source for HVM Lithography, Next Generation Lithography, Laser Produced Plasma, Short-Pulse High-Power CO2 laser, Sn Plasma |
Current contact address
| Country | Japan |
|---|---|
| City | Hiratsuka |
| Institution | Gigaphoton Inc. |
| Institute | EUV Group |
| Homepage | www.gigaphoton.com |
Host during sponsorship
| Prof. Dr. Mitsuo Maeda | Department of Electrial Engineering, Kyushu University, Fukuoka |
|---|---|
| Start of initial sponsorship | 01/12/1995 |
Programme(s)
| 1995 | Research Fellowship Programme from the Japan Society for the Promotion of Science (JSPS) |
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